diff --git a/.gitmodules b/.gitmodules
index 389a903343..64ad14e6ac 100644
--- a/.gitmodules
+++ b/.gitmodules
@@ -4,6 +4,9 @@
 [submodule "cmake/external/googletest"]
 	path = cmake/external/googletest
 	url = https://github.com/google/googletest.git
+[submodule "cmake/external/googlebenchmark"]
+	path = cmake/external/googlebenchmark
+	url = https://github.com/google/benchmark.git
 [submodule "cmake/external/onnx"]
 	path = cmake/external/onnx
 	url = https://github.com/onnx/onnx
diff --git a/cgmanifests/submodules/cgmanifest.json b/cgmanifests/submodules/cgmanifest.json
index 7bb7befc6b..f4ac602b82 100644
--- a/cgmanifests/submodules/cgmanifest.json
+++ b/cgmanifests/submodules/cgmanifest.json
@@ -198,6 +198,16 @@
         "comments": "git submodule at cmake/external/flatbuffers"
       }
     },
+    {
+      "component": {
+        "type": "git",
+        "git": {
+          "commitHash": "7d0d9061d83b663ce05d9de5da3d5865a3845b79",
+          "repositoryUrl": "https://github.com/google/benchmark.git"
+        },
+        "comments": "git submodule at cmake/external/googlebenchmark"
+      }
+    },
     {
       "component": {
         "type": "git",
diff --git a/cmake/CMakeLists.txt b/cmake/CMakeLists.txt
index 6848b04b7c..409e80cfee 100644
--- a/cmake/CMakeLists.txt
+++ b/cmake/CMakeLists.txt
@@ -664,7 +664,7 @@ if(onnxruntime_BUILD_BENCHMARKS)
     set(BENCHMARK_ENABLE_TESTING OFF CACHE BOOL "Disable benchmark testing as we don't need it.")
     # We will not need to install benchmark since we link it statically.
     set(BENCHMARK_ENABLE_INSTALL OFF CACHE BOOL "Disable benchmark install to avoid overwriting vendor install.")
-    add_subdirectory(${PROJECT_SOURCE_DIR}/external/onnx/third_party/benchmark EXCLUDE_FROM_ALL)
+    add_subdirectory(${PROJECT_SOURCE_DIR}/external/googlebenchmark EXCLUDE_FROM_ALL)
     add_library(benchmark::benchmark ALIAS benchmark)
   endif()
 endif()
diff --git a/cmake/external/googlebenchmark b/cmake/external/googlebenchmark
new file mode 160000
index 0000000000..7d0d9061d8
--- /dev/null
+++ b/cmake/external/googlebenchmark
@@ -0,0 +1 @@
+Subproject commit 7d0d9061d83b663ce05d9de5da3d5865a3845b79